Machining metre-sized gratings with nanometre accuracy

Long-term goals (5-10yr horizon)

• Make 1.2m x 0.2m echelle gratings for ELT spectroscopy
• Develop technology for 2-d patterning with nanometre precision over metre scales

Overall concept

Current project (2021-2024)

• Develop "lithography engine" for patterning a 150mm wafer
• Measure performance
• Make and test gratings based on single wafers

"Lithography engine" concept

Measuring grating performance

Timeline from proposal